PE-CVD for Silicon Wafer Solar Cell

PE-CVD for Silicon Wafer Solar Cell


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Other Machinery & Industry Equipment
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SNTEK Co.,Ltd.

Country / Year Established
South Korea South Korea /
Business type
Others
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Product Information

Features

BCS5000 Plasma enhanced CVD system is batch-production equipment.
That supports the application of silicon based thin film process of fearing step coverage and gap filling required during semiconductor fabrication and solar cell device processes, Including the applications of passivisation, isolation and dielectric insulation depositions.

Application

  • A-Si, Sio2, Si3N4 Deposition
  • Passivisation, isolation
  • Solar Cell Device

Specification

  • Sample Size : 156mm x 156mm x 4PCS
  • Power Source : RF 13.56MHz
  • Deposition Type : PECVD
  • Plasma Type : Direct Plasma
  • Substrate Temperature : Max. 450°C
  • Working Pressure :  30m Torr ~ 5Torr
  • Film Thickness Uniformity : ±2.5%
  • Film Thickness Uniformity Wafer to wafer : ±2.5%
  • Refractive Index : 1.9 ~ 2.3
  • Pump Station : Booster + Rotary pump

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SNTEK Co.,Ltd.

Country / Year Established
South Korea South Korea /
Business type
Others

16

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DUNS

President
K. J Ahn
Address
#987-1, Gosaek-dong, Gwonsun-gu, Suwon-si, Gyeonggi-do, Korea
Product Category
Other Machinery & Industry Equipment
No. of Total Employees
1-50
Company introduction

Business Ideas.
Passion: Making a work delightful while smile is originated from the delight, vitalizing the organization.
Innovation: Breaking from the convention, innovative and creative thinking warrants distinguished business of management and technology
Faith: Every human relation is developed and based on faith.
Customer delight and satisfaction will make a customer be faithful.

VISION.
* Blue Chip Business of Plasma Process Equipment in 2010
SNTEK is specialized in the applied plasma technology, which is the core of semiconductor and display device, ambitiously setting a goal to be the top plasma core process device manufacturing maker through the ceaseless R&D activities and creating the maximized value for employees and investors.
*In 2015, the corporation aims to be the world's best high tech device manufacturer.
SNTEK will continue to develop applied plasma technology to be the state-of-the-art plasma device maker in the world's next generation industry, as one of the world's leading businesses.

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