Remote Plasma Control Valve

Remote Plasma Control Valve


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Keyword
Category
Valves
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AKTECH Co., Ltd.

Country / Year Established
South Korea South Korea /
Business type
Others
Verified Certificate

12

Product name Remote Plasma Control Valve Certification -
Category Valves Ingredients -
Keyword - Unit Size -
Brand name - Unit Weigh -
origin Stock -
Supply type - HS code -

Product Information

Remote Plasma Control Valve

Application

  • High vacuum process
  • All CVD process (including MO, PE, HDP, LP and AP)
  • Photovoltaic and semiconductor application

Features

  • Pneumatic actuation
  • Rated for 1 million cycles
  • Double o-ring seal
  • Easy maintenance

Options

  • Various o-ring compounds (Kalrez®, Chemraz®, etc.)

Specification

Pressure range
1x10-8mbar.l/s
Leak rate:body, seat
<1x10-9mbar.l/s
Differential pressure on the gate
<1.5 bar in either direction
Material
Valve body, bonnet seal, blade
AL6061
Welded bellows
 
Valve actuator
AL6061
Seal Materials
CHEMRAZ
Temperature
Valve body
150°C
Valve actuator
100°C
Operation
Double acting
Cycle until first service
>1 million
Position sensor(open/close)-Reed switch
Honeywell(11SM-244-T, JS-5

 

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Price (FOB) Negotiable transportation -
MOQ Negotiable Leadtime Negotiable
Payment Options Negotiable Shipping time Negotiable

AKTECH Co., Ltd.

Country / Year Established
South Korea South Korea /
Business type
Others

12

President
Yongdae Kim
Address
#332-2 Woncheon-dong, Yeongtong-gu,, Sunwon-si, Gyeonggi-do, Korea
Product Category
Pumps,Valves
No. of Total Employees
1-50
Company introduction

Greeting
I am Kim Yong-Dae, the CEO of AK Tech.

Under our motto, "providing projects and services with perfect quality beyond customer's expectation, "AK Tech has been supplying products to domestic and overseas semiconductor device makers. Our reputation is getting recognized more and more in the semiconductor industry.

All our members have been endeavoring for R&D and accumulating unique know-how in the core fields of semiconductor parts - Bellows, Valve, Heater, Magnetic seal and RPS.

At present as technological environment in the semiconductor industry changes drastically, we are committed to researching and developing the core semiconductor parts.

AK Tech will keep on investing and hard working until we become world's best semiconductor parts company.

Please, give us support and affection until that day.

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