Mask Aligner

Mask Aligner


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Required Quantity
Place of Origin
Payment Terms
Negotiable
Production method
Negotiable
Shipping / Lead Time
Negotiable / Negotiable
Keyword
Category
Other Machinery & Industry Equipment
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Taekwang Trading Co., Ltd.

Country / Year Established
South Korea South Korea /
Business type
Others
Verified Certificate

16

DUNS

Product name Mask Aligner Certification -
Category Other Machinery & Industry Equipment Ingredients -
Keyword - Unit Size -
Brand name - Unit Weigh -
origin Stock -
Supply type - HS code -

Product Information

Features

This instrument is a single-side exposure proximity/soft contact/contact mask aligner having two separate paired sets of objective lenses, one above the alignment stage and the other in the substage to enable the designated area of a wafer surface to be accurately exposed for patterning in conjunction with the bottom surface pattern, It is effective for a mask- to- wafer patterning in the R&D of MEMS elements such as semiconductor pressure sensors.

System Specification

Model PEM-800 PEM-6M
Photomask size Max. 5-inch Max. 7-inch
Wafer size Amorphous~ 4 inch Amorphous~ 6 inch
Mask holder sliding Manual chuck Manual chuck
Mask movement X=+-3 mm, Y=+-3 mm X=+-3 mm, Y=+-3 mm
Alignment scope
  1. Objective lenses: 10x two symmetrical pairs.
  2. Eyepieces : NWF 10x,one pair
  3. Total magnification:100x
  4. Objective lens separation:15~90mm(800),80~140mm(6M)
  5. Field of view: split field
  6. Scope:Relocating and rotatable. Y axis movement: 80mm
  7. Focusing Unit
Alignment repeatability within 5 micro
Exposure Proximity/soft/hard contact/
Resolution 3 micro L/S
Exposure unit 250W ultra-high pressure mercury 500W ultra-high pressure mercury
Exposure mode

mode 1 :each wafer is equalized,aligned, exposed
mode 2:After the first wafer is once equalized,the second is immediately exposed by keeping the print gap constant,omitting equalization and realignment.

Dimensions(main) 750Wx850Dx1700H mm 940Wx860Dx1670H mm
Net Weight 450 kg 550 kg
Utilities

Power supply:
100~220V AC 50/60Hz, 600W (main)
100~200V AC,50/60Hz,550W(mercury)
N2 gas,0.4~o.5 MPa
Vaccum below -80KP

Power supply:
100~220V AC 50/60Hz, 600W (main)
100~200V AC,50/60Hz,1100W(mercury)
N2 gas,0.4~o.5 MPa
Vaccum below -80KP
Standard configuration
  1. Alignment & Objective Scope:10x,two pairs,symmetrical
  2. standard photomask & wafer holder : one
  3. controller
  4. power supply unit for mercury lamp and main unit
  5. Table
Option
  1. NWF 15x eyepieces(paired)
  2. TV equipment
Others    

B2B Trade

Price (FOB) Negotiable transportation -
MOQ Negotiable Leadtime Negotiable
Payment Options Negotiable Shipping time Negotiable

Taekwang Trading Co., Ltd.

Country / Year Established
South Korea South Korea /
Business type
Others

16

DUNS

President
CHO, HONG-HEE
Address
99-3, Garak-dong, Songpa-gu, SEOUL, KOREA
Product Category
Dictionaries & Translators,Other Chemicals
No. of Total Employees
1-50
Company introduction

Our company specializes in selling and developing the chemicals, instrumental products related to operating the sample to mainly microelectronics surface application and semiconductor in micro scale.

Through a long years of operations to perform our best business service  in the this field, we have established a large customer'credits and is competent and ready to help resolve technical problems and to engage in the development of special materials for our customers.

We are happy to work with your engineers and scientists to provide timely, cost-effective solutions to your company's needs good in microelectronic and semiconductor.

We create the future to offer the best business service worth to our customers and enlarge our business to more products as a leading company of microelectronic,

Best Regards.

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