In-line Sputter System for Large Area Deposition

In-line Sputter System for Large Area Deposition


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Shipping / Lead Time
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Keyword
pvd, sputter, magnetron sputter
Category
Other Machinery & Industry Equipment
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A-Tech System, Inc.

Country / Year Established
South Korea South Korea /
Business type
Others
Verified Certificate

12

DUNS

Product name In-line Sputter System for Large Area Deposition Certification -
Category Other Machinery & Industry Equipment Ingredients -
Keyword pvd , sputter , magnetron sputter Unit Size -
Brand name - Unit Weigh -
origin Stock -
Supply type - HS code -

Product Information

Optical coatings
Hard coatings
Metal coatings
Polymer surface modifications
Coatings for flat panel display electorates

Special Features

In-line sputter system with 8ea linear sputter guns for R&D and a small-scale production.
Automatic process control through PLC interfacing.
Carrier loading capability : 2x24" sheets/carrier.
Standard tact time: depends on processing.
Automatic jig moving system.
Ion cleaning system with linear ion gun.
Sheet capacity : 300 × 24" per day.
Average throughput Up to 90,000 sheets per year

Specifications

Dimension : 10,464L x 2,244.5H x 1,363W(mm3)
Power : Sputter Gun: DC Pulse 10kW
Ion Gun: 3kW
Gas : Ar, O2, N2
Pump : Loading, Rotary(1,000L/min), TMP(800L/sec)
Process, Rotary(1,000L/min), TMP(1,400L/sec)

B2B Trade

Price (FOB) Negotiable transportation -
MOQ Negotiable Leadtime Negotiable
Payment Options Negotiable Shipping time Negotiable

A-Tech System, Inc.

Country / Year Established
South Korea South Korea /
Business type
Others

12

DUNS

President
Cho, Young Sang
Address
175-25, Cheongcheon-Dong 2, Bupyeong-Gu, Incheon, 403-853, Rep. Korea
Product Category
Machinery & Parts
Company introduction

Developed itmes

- Ion beam source
- Arc source
- Filtered cathodic vacuum arc system and process
- LPCVD for nanotube synthesis
- Silica PECVD system
- UHV(Ultra High Vacuum) sputtering system
- Silica TCP (Transformer Coupled Plasma) etcher
- UHV-sputter system for ferromagnetic multilayers
- Vacuum arc system for nitrides deposition
- In-line system of vacuum arc deposition for protecting PDP
  electrodes
- High vacuum test system for a flat light source evaluation
- Multifunctional standard sputtering system for R&D
- NPPN(New Post Plasma Nitriding) System
- Sputter for polygon mirror applicable to laser printer
- Production scale of arc ion plating (AIP) system
- Ion beam sputter for precision optics
- Production scale of AIP and NPPN systems
- Ion plating system for various coloration
- Pilot scale of arc discharge equipment for CNT transparent electrode
  sputter web coater for flexible display research
- Sputter system for ophthalmic
- Polycrystalline silicon ingot growing equipment
- PECVD system for anti-reflective coatings on solar cell
- PECVD system for graphene deposition
- Al plasma nitriding equipment for mass production with KAITECH
- Equipment of carbon nanotube using electrical arc discharge method
- Graphene PECVD-PVD Cluster equipment

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