The VTS’ in-situ type vacuum gauge calibration system is designed for direct and comparative vacuum gauge calibration and shall be used as a primary standard vacuum calibration system.
Measurement ranges and accuracies are selectable by customer.
This system is verified by KRISS(Korea Research Institute of Standard and Science) vacuum center.
1. Direct and comparative vacuum gauge calibration.
2. Standard in-situ type vacuum calibration.
3. Measurement ranges and accuracies are selectable by customer.
4. This system is verified by KRISS Vacuum Center.
1. Gas reservoir module
2. Vacuum chamber: Multi chamber (Chamber A, B, C)
3. Pumping system: Rotary & TMP
4. Gauge & Sensor: Full range, Convection, CDG, etc.
5. Control module
VTS Corporation is manufacturer of LED, Solar, Touch screen panel peocess equipments.
We suppy MOCVD system for LED, Screen printer and firing furnace fo Solar and Roll to roll sputtering system for Touch Screen Panel productions...