Thermal CVD system

Thermal CVD system


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Keyword
vacuum, chemical vapor deposition, deposition
Category
Other Machinery & Industry Equipment
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VTS Corporation.

Membership
BIZ
Country / Year Established
South Korea South Korea / 2003
Business type
Manufacturer
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Product name Thermal CVD system Certification -
Category Other Machinery & Industry Equipment Ingredients -
Keyword vacuum , chemical vapor deposition , deposition Unit Size -
Brand name - Unit Weigh -
origin Stock -
Supply type - HS code -

Product Information

Outline

Thermal CVD system of the VTS corporation is thin film deposition equipment using a reaction to adhere gas atoms onto a plate by ionizing the reactive gas with the thermal source energy.

 

General Specification

1. Chamber: Water cooled double wall chamber

2. Sample size: Max 50 x 500 mm

3. Base pressure: < 9E-4 Torr

4. RF plasma: RF power supply 600W

5. Heater: Hot wall resistance heater

6. Heating control: 3-zone heating control

7. Operating temp.: ~950degree C (Max. 1,000degree C)

8. Process gas: Ar, H2, CH4

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Price (FOB) Negotiable transportation -
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Payment Options Negotiable Shipping time Negotiable

VTS Corporation.

Country / Year Established
South Korea South Korea / 2003
Membership
BIZ
Business type
Manufacturer

16

TRADE TOWER

DUNS

President
Wonho Jung
Address
1331 Gwanpyung Dong Yusung Gu Daejeon KOREA
Product Category
General Industrial Equipment,Industrial Supplies,Machinery & Parts
Year Established
2003
No. of Total Employees
1-50
Company introduction

VTS Corporation is manufacturer of LED, Solar, Touch screen panel peocess equipments.

We suppy MOCVD system for LED, Screen printer and firing furnace fo Solar and Roll to roll sputtering system for Touch Screen Panel productions...

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China China

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