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Product Information

Outline

Thermal CVD system of the VTS corporation is thin film deposition equipment using a reaction to adhere gas atoms onto a plate by ionizing the reactive gas with the thermal source energy.

 

General Specification

1. Chamber: Water cooled double wall chamber

2. Sample size: Max 50 x 500 mm

3. Base pressure: < 9E-4 Torr

4. RF plasma: RF power supply 600W

5. Heater: Hot wall resistance heater

6. Heating control: 3-zone heating control

7. Operating temp.: ~950degree C (Max. 1,000degree C)

8. Process gas: Ar, H2, CH4

Image
Company
VTS Corporation.

VTS Corporation.

Country South Korea South Korea

Supplier Grade level3

President
Wonho Jung
Address
1331 Gwanpyung Dong Yusung Gu Daejeon KOREA
Product Category
Machinery & Parts,Industrial Supplies,General Industrial Equipment
Year Established
2003
No. of Total Employees
1-50
Company introduction

VTS Corporation is manufacturer of LED, Solar, Touch screen panel peocess equipments.

We suppy MOCVD system for LED, Screen printer and firing furnace fo Solar and Roll to roll sputtering system for Touch Screen Panel productions...

Main Markets
  • China China ,
  • Indonesia Indonesia ,
  • India India ,
  • Japan Japan ,
  • South Korea South Korea ,
  • Malaysia Malaysia ,
  • Pakistan Pakistan ,
  • Singapore Singapore ,
  • Taiwan Taiwan ,
  • U.S.A U.S.A