Mini sputter system(DaON-MS) of the VTS corporation is a compact, modern desktop system capable of fast cycle times. DaON-MS, designed for electron microscopy sample and similar application, offers rapid pump-down times, fine grain coatings. Its quick-change target method allows a range of metals to be used.
DaON-MS allows independent choice of sputter current and argon pressure.
1. Chamber: Pyrex bell jar chamber
2. Substrate size: Up to 2inch Single wafer
3. Sputter source: 2inch circular sputter source
4. Power: 1kW DC power supply
5. Dimension: 800(W) X 750(D) X 1200(H) (mm)
VTS Corporation is manufacturer of LED, Solar, Touch screen panel peocess equipments.
We suppy MOCVD system for LED, Screen printer and firing furnace fo Solar and Roll to roll sputtering system for Touch Screen Panel productions...