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Product Information

Outline

Mini sputter system(DaON-MS) of the VTS corporation is a compact, modern desktop system capable of fast cycle times. DaON-MS, designed for electron microscopy sample and similar application, offers rapid pump-down times, fine grain coatings. Its quick-change target method allows a range of metals to be used.

DaON-MS allows independent choice of sputter current and argon pressure.

 

General specification

1. Chamber: Pyrex bell jar chamber

2. Substrate size: Up to 2inch Single wafer

3. Sputter source: 2inch circular sputter source

4. Power: 1kW DC power supply

5. Dimension: 800(W) X 750(D) X 1200(H) (mm)

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Company
VTS Corporation.

VTS Corporation.

Country South Korea South Korea

Supplier Grade level3

President
Wonho Jung
Address
1331 Gwanpyung Dong Yusung Gu Daejeon KOREA
Product Category
Machinery & Parts,Industrial Supplies,General Industrial Equipment
Year Established
2003
No. of Total Employees
1-50
Company introduction

VTS Corporation is manufacturer of LED, Solar, Touch screen panel peocess equipments.

We suppy MOCVD system for LED, Screen printer and firing furnace fo Solar and Roll to roll sputtering system for Touch Screen Panel productions...

Main Markets
  • China China ,
  • Indonesia Indonesia ,
  • India India ,
  • Japan Japan ,
  • South Korea South Korea ,
  • Malaysia Malaysia ,
  • Pakistan Pakistan ,
  • Singapore Singapore ,
  • Taiwan Taiwan ,
  • U.S.A U.S.A