Vacuum In-Line Sputtering System

Vacuum In-Line Sputtering System


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Other Machinery & Industry Equipment
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Korea Vac-Tec Co., Ltd.

Country / Year Established
South Korea South Korea /
Business type
Others
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Product name Vacuum In-Line Sputtering System Certification -
Category Other Machinery & Industry Equipment Ingredients -
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Product Information

The Sputtering System

    consists of a chamber made of SUS 304, mounted on a frame, pumping system, magnetron sputtering system substrate heating system, gas system, control system.

Chamber

    has rectangular shape. it is made of 304 stainless steel Chamber has a door in front, substrate transport system, heating zone and sputterig zone(zones)

Pumping System

    can be based on diffusion pump or on turbo-, or cryo-pumps in accordance with customer requirements.

Magnetron Sputter method

    can be based on a single DC sputter, or dual pulsed sputter process (for oxide materials). target size can vary from 250 mm length up to 1600 mm length.

Gas Control System Substrate Heater

    provides heating of a substrate prior to coating Heating element : sheathed heater

Control System Power Supply

    in dependence of customer's requirements. can be DC, or RF, or pulsed (UNI of BIPOLAR).

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Price (FOB) Negotiable transportation -
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Korea Vac-Tec Co., Ltd.

Country / Year Established
South Korea South Korea /
Business type
Others

16

TRADE TOWER

DUNS

President
Myung-sei Choi
Address
811-22, Youngtae-ri, Wolrong-myeon, Paju-si, Gyeonggi-do, Korea
Product Category
Ventilation Fans & Parts
No. of Total Employees
1-50
Company introduction

Last decades one can observe an interest to vacuum technique and technology. It's applications can be found in electronics, machine building, nuclear physics, metallurgy, food production industry, architecture, optics, space technologies, medicine, etc.

The VAC-TEC Company was established in 1987. Head office and plant are located in Paju city, Kyonggi-do region. During this time the VAC-TEC Company had produced different types of vacuum machines for various applications.

VAC-TEC Production utilises such vacuum processes as;

-EB-Gun evaporation supported with Ion Beam pre-cleaning and assistance (for optical coatings);
-Magnertron sputtering of metals, metal oxides,
-metal nitrides on grass, plastic, etc. surfaces with balanced and unbalanced magnetrons;
-Vacuum hardening, brazing and sintering; Vacuum frying of snack;
-Cathodic ARC hardcoating on tools and machine parts, decorative coatings on concumer goods;
-Plasma Enhanced CVD (PE CVD);
-Vacuum metallizing, etc.

Main Markets

China China

India India

Malaysia Malaysia

Thailand Thailand

Turkey Turkey

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