SPUTTERING (Batch Type)

SPUTTERING (Batch Type)


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Vacuum Equipment & Parts
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Univac Co., Ltd.

Country / Year Established
South Korea South Korea /
Business type
Others
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16

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DUNS

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Product Information

SPUTTERING (Batch Type)
Pursuit of the Best Quality

"Sputtering" is a vacuum process used to deposit very thin films on substrates for a wide variety of commercial and scientific purposes. It is performed by applying a high voltage across a low-pressure gas (usually argon at about 5 military) to create a "plasma, "which consists of electrons and gas ions in a high-energy state. During sputtering, energized plasma ions strike a "target", composed of the desired coating material, and cause atoms from that target to be Ejected with enough to travel to, and bond with, the substrate.

Features

  • Dimension : Φ1400 x H1630.
  • Magnetron sputtering target (3ea).
  • DC pulse power supply for sputtering (20kW, 30kHz).
  • Linear type ion source.
  • DC power supply for ion source
    (5kW, normal).
  • Low vacuum pump
    (Rotary & Booster pump).
  • Vacuum gauge (2Low & 1 High range).
  • Deposition control by XTC according to deposition time.
  • Gas flow by MFC (2 Ar, 2 O2 each).
  • Heating system by micro heater.
  • PC-based system controller.
  • Cooling system (Polycold). High vacuum pump (Oil diffusion pump, 22" x 2ea / option : Turbo molecule)

Benefits

  • Reducing of pumping time by using effective Univac's oil diffusion pump.
  • Excellent uniformity & maximum production yields.
  • Easy operation & maintenance.
  • PC-based effective automatic system control for coating process.
  • Increased film adhesion.
  • Low temperature coating process available.
  • Various color deposition according to used material.

This sputtering system is equipped with 3 targets, also known as cathodes, and 1 linear type DC Ion Source for pretreatment. These parts are located at the left and right sides of the machine on pairs. In order to improve production yield, it consist of Univac’s large capacity oil diffusion pumps with faster pumping time and 2 batch type doors with revolution-rotation substrate holders. Effective automatic system control enables easy coating process and excellent products. Ar is the primary gas used to sputter atoms from the targets and O2 is used for reactive sputtering to adjust stoechiometry of oxides if needed.
   
Application of an axial magnetic field increase the path length of the electron because electrons execute longer helical path orbits before they reach the anode. The magnetic field helps the electrons to stay away from the walls of the sputtering chamber, thereby reducing the losses of electrons due to recombination process at the walls. In a combined electric and magnetic fields, the electrons remain in a trap near the target, so that they increase their ionizing effect. Magnetron configurations eliminate the path of the electrons going to the walls or to the substrate. Magnetrons, the sputtering sources with magnetic confinement of electrons, greatly enhance the capability of the sputtering process by increasing ionization process. Magnetron sputtering achieves high deposition rates.
   

Benefits

  • Decorative coating on glass / plastic / metal.
  • Coating on flat panel display / solar cells.
  • Wear resistant coating.
  • Mirror coating.
  • EMI coating.
  • Low layer optical component coating.
  • Bio coating (Photo catalyst etc).

B2B Trade

Price (FOB) Negotiable transportation -
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Payment Options Negotiable Shipping time Negotiable

Univac Co., Ltd.

Country / Year Established
South Korea South Korea /
Business type
Others

16

TRADE TOWER

DUNS

President
Heung-sang Yoo
Address
#335, Mangdung-ri, Juchon-myeon,, Gimhae-si,Gyeongsangnam-do,
Product Category
Other Machinery & Industry Equipment
Company introduction

Univac Ltd. was founded in1987 as Union Vacuum Technology, and since then developed into the specialized vacuum equipment manufacturer.

The continuous and arduous endeavors under the motto "Pursuit of the Best Quality" has brought about the customers' appreciation of the excellency of the quality and enabled us to settle down the best vacuum applied equipment manufacturer.

In order to efficiently meet with the potentially increasing trend of work orders from the 21st century world markets, Univac Ltd. are prepared with the massive production through the enlarged and augmented production facilities.

All the members of Univac Limited will strive to do our best for the supply of products which satisfy the customers demanding requirements and needs.

We look forward to the everlasting patronages from all of you.

Thank you.

 

Main Markets

China China

India India

Malaysia Malaysia

Taiwan Taiwan

Thailand Thailand

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