RTX-II
Negotiable Min Order Quantity Unit
- Required Quantity
-
- Place of Origin
- Payment Terms
- Negotiable
- Production method
- Negotiable
- Shipping / Lead Time
- Negotiable / Negotiable
- Keyword
- Category
- Other Machinery & Industry Equipment
Apply a video call to the Supplier
Kookje Electric Korea Co., Ltd.
- Country / Year Established
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South Korea
/
- Business type
- Others
- Verified Certificate
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16
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| Keyword | - | Unit Size | - |
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Product Information
As devices are being highly accumulated and detailed, organizing Swallow Junction, Low Terminal Budget and Thermal Stress according to large diameter are being strongly required.
This equipment is quick heat treatment device suitable for massive production of 8" and 12". wafer Massive production and efficiencies might be maximized through the optimized Foot Print of Two Chamber Type and various public applications.
Benefits and Features
- High Precision Temperature Control
By measuring the temperature of (high precision temperature control) wafer surface
directly, it realizes high precision temperature control twice more accurate than existing
RTP devices. (Existing RTP devices measures at the other side of wafer) - Cluster (Process Integration)
Cluster technology continuously treat surface characteristics improvement low pressure ◎ CVD with remote plasma as well as quick heat treatment. - Minimizing Foot print (Minimum floor Space)
Since it enables continuous close installation, it realizes minimizing the foot print. - Process Application
RTA,RTO,RTN,RPO,RPN,RT-CVD
Specifications
| Classification | Process Chamber | Cassette I/O | Foot Print | Wafer Transfer | Dimensions (W ×D ×H) |
| RTX-II | max 3 Chamber | 2 Cassettes | 7.8 ㎡(3Chamber), 3.0 x 2.6 |
L/L Chamber | 900 ×1925 ×3150mm |
B2B Trade
| Price (FOB) | Negotiable | transportation | - |
|---|---|---|---|
| MOQ | Negotiable | Leadtime | Negotiable |
| Payment Options | Negotiable | Shipping time | Negotiable |
- President
- Jaleong Jang
- Address
- 4-2, Chaam-dong, Cheonan Si, Chungcheongnam-do, Korea
- Product Category
- Other Machinery & Industry Equipment
- No. of Total Employees
- 101-500
- Company introduction
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Kookje Electric Korea Co., Ltd. with putting all efforts on continuous research and development based on the company philosophy of being 'the Foundation of Korean Semiconductor Industry' was jointly established with worldwide semiconductor equipment maker Hitachi Kokusai Electric Inc. in May, 1993. Our goal is localizing the semiconductor equipment through the manufacture, sales of semiconductor & LCD equipment, maintenance and R&D.
Our major products are the Vertical Diffusion Furnace proceeding isolation process and others by generating oxide films, and Vertical LP CVD System treats that generate crucial films of equipment. These equipment take charge of critical processes in high quality semiconductor productions.
- Main Markets
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China
Japan
Taiwan
U.S.A
- Main Product
